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Saturation degree in dopant monolayers as modulator of Al-doping of ZnO by the Atomic Layer Deposition-supercycle approach
by
Mazón-Montijo, Dalia Alejandra
,
Ortiz-Atondo, Axel Agustín
,
Zúñiga-Verdugo, Gerdany
,
Cabrera-German, Dagoberto
,
Ramírez-Esquivel, Obed Yamín
,
Montiel-González, Zeuz
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Thin solid films
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Thin Solid Films
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Active Defects
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Aluminum Doping
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Atomic Layer Deposition
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Electrical Resistivity
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Materials Science
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Materials Science, Coatings & Films
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Supercycle Approach
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Ultrathin Films
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Zinc Oxide
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