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Advanced chemical vapor deposition silicon carbide barrier technology for ultralow permeability applications
by
Zambov, Ludmil
,
Weidner, Ken
,
Shamamian, Vasgen
,
Camilletti, Robert
,
Pernisz, Udo
,
Loboda, Mark
,
Cerny, Glenn
,
Gidley, David
,
Peng, Hua-Gen
,
Vallery, Richard
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films
by
Zambov, L. M.
,
Popov, C.
,
Abedinov, N.
,
Plass, M. F.
,
Kulisch, W.
,
Gotszalk, T.
,
Grabiec, P.
,
Rangelow, I. W.
,
Kassing, R.
Published in
Advanced materials (Weinheim)
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Advanced chemical vapor deposition silicon carbide barrier technologyfor ultralow permeability applications
by
Zambov, Ludmil
,
Weidner, Ken
,
Shamamian, Vasgen
,
Camilletti, Robert
,
Pernisz, Udo
,
Loboda, Mark
,
Cerny, Glenn
,
Gidley, David
,
Peng, Hua-Gen
,
Vallery, Richard
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Design of injection feed multiwafer low-pressure chemical vapor deposition reactors
by
ZAMBOV, L
,
POPOV, C
,
IVANOV, B
Published in
Journal of the Electrochemical Society
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Journal Title
Journal Of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films
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Advanced Materials
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Journal Of The Electrochemical Society
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Journal Of Vacuum Science & Technology A: Vacuum, Surfaces, And Films
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Journal Of Vacuum Science And Technology. A, International Journal Devoted To Vacuum, Surfaces, And Films
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Subjects
Chemical Vapor Deposition
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Materials Science
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Materials Science, Coatings & Films
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Physical Sciences
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Physics
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Science & Technology
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Technology
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Carbon Nitride
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Coatings
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Cross-Disciplinary Physics: Materials Science; Rheology
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Electrochemistry
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Epitaxy
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Exact Sciences And Technology
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Gas
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Layers
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Microelectromechanical Systems
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Nanostructures
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Permeability
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Physics, Applied
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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American Institute Of Physics (Aip) Publications
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Wiley-Blackwell Journals (Backfile Content)
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Wiley Blackwell Single Titles
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Wiley-Blackwell Read & Publish Collection
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Aip Digital Archive
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Institute Of Physics Iop Science Extra
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Wiley-Blackwell Materials Science Backfiles
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