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Surface passivation of InGaP/GaAs HBT using silicon-nitride film deposited by ECR–CVD plasma
by
Manera, L.T.
,
Zoccal, L.B.
,
Diniz, J.A.
,
Tatsch, P.J.
,
Doi, I.
Published in
Applied surface science
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RF passive components in MCM-D
by
Zoccal, L.B.
,
Yamamoto, S.D.
,
Cabreira, C.M.
,
Flacker, R.A.
,
Gomes, E.A.
,
Diniz, J.A.
,
Swart, J.W.
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Conference Proceeding
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Ecr-Cvd Plasma
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