Search Results - van Lievenoogen, Anne

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    Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field

    Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field by van Lievenoogen, Anne, Toma, Adrian, Ummethala, Upendra

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    Applications of control systems and optimization in the design of semiconductor capital equipment

    Applications of control systems and optimization in the design of semiconductor capital equipment by Ummethala, Upendra, Hench, John J., van Lievenoogen, Anne, Subrahmanyan, Pradeep

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