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Hydrogen doping of DC sputtered ZnO:Al films from novel target material
by
Ruske, F.
,
Sittinger, V.
,
Werner, W.
,
Szyszka, B.
,
van Osten, K.-U.
,
Dietrich, K.
,
Rix, R.
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Surface & coatings technology
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Surface & Coatings Technology
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Cross-Disciplinary Physics: Materials Science; Rheology
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Zinc Oxide
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