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Post-deposition thermal annealing studies of hydrogenated microcrystalline silicon deposited at 40 °C
by
Bronsveld, P.C.P.
,
van der Wagt, H.J.
,
Rath, J.K.
,
Schropp, R.E.I.
,
Beyer, W.
Published in
Thin solid films
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Thin Solid Films
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Annealing
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Chemical Vapor Deposition
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Defects And Impurities In Crystals; Microstructure
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Exact Sciences And Technology
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Fourier Transform Infrared Spectroscopy
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Hydrogen
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Materials Science
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Microscopic Defects
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Physics
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Silicon
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Structure And Morphology; Thickness
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Structure Of Solids And Liquids; Crystallography
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Surfaces And Interfaces; Thin Films And Whiskers
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Thin Film Structure And Morphology
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Sciencedirect Journals
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Elsevier Sd Backfile Materials Science
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Backfile Package - Physics General (Legacy) [Ypa]
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