Search Results - von Münch, Waldemar

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    A two-step electrochemical etch-stop to produce freestanding bulk-micromachined structures

    A two-step electrochemical etch-stop to produce freestanding bulk-micromachined structures by Eichner, D, von Münch, W

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  2. 2
    New susceptor arrangement for the epitaxial growth of β-SiC on silicon

    New susceptor arrangement for the epitaxial growth of β-SiC on silicon by von Münch, Waldemar, Ruhnau, Ulrich

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