Detailed simulation for semiconductor manufacturing

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Bibliographic Details
Main Authors: Atherton, Robert W., Atherton, Linda F., Pool, Mark A.
Format: Conference Proceeding
Language:English
Subjects:
Applied computing > Enterprise computing
Applied computing > Operations research > Industry and manufacturing
Applied computing > Physical sciences and engineering > Electronics
Applied computing > Physical sciences and engineering > Engineering
Computing methodologies > Artificial intelligence > Control methods
Computing methodologies > Artificial intelligence > Control methods > Computational control theory
Computing methodologies > Modeling and simulation
Computing methodologies > Modeling and simulation > Model development and analysis
Computing methodologies > Modeling and simulation > Model development and analysis > Model verification and validation
Online Access:Get full text
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DOI:10.5555/328885.329051