Modeling and Simulation of Electromechanical Transducers in Microsystems Using an Analogue Hardware Description Language

The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method....

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Bibliographic Details
Main Authors: Romanowicz, B., Laudon, M., Lerch, P., Renaud, P., Amann, H. P., Boegli, A., Moser, V., Pellandini, F.
Format: Conference Proceeding
Language:English
Subjects:
Applied computing
Applied computing > Physical sciences and engineering
Applied computing > Physical sciences and engineering > Engineering
Computing methodologies
Computing methodologies > Modeling and simulation
Computing methodologies > Modeling and simulation > Model development and analysis
Computing methodologies > Modeling and simulation > Model development and analysis > Modeling methodologies
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Summary:The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method. All models of transducers are written in HDL-A/sup TM/, a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.
DOI:10.5555/787260.787645