清洁、大流量真空差分系统的研制

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Bibliographic Details
Published in:Chinese physics C 2008 (z1), p.59-61
Main Author: 蒙峻 杨晓天 张素平 储继国
Format: Article
Language:English
Subjects:
新型分子/增压泵
残余气体分析
清洁大流量差分系统
Online Access:Get full text
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ISSN:1674-1137
0254-3052