Synthesis of Co-silicides and fabrication of microwavepower device using MEVVA source implantation

• Published in: Science China. Technological sciences 2002 (4), p.348-352
• Main Author: ZHANG Tonghe(张通和) WU Yuguang(吴瑜光) QIAN Weidong(钱卫东) LIU Yaodong(刘要东) ZHANG Xu(张旭)
• Format: Article
• Language: English
• Subjects: annealing; flux; high; implantation; into; ion; rapid; silicides; silicon; thermal
• ISSN: 1674-7321; 1869-1900

Co synthesis silicides with good properties were prepared using MEVVA ion implantation with flux of 25-125 mA/cm2 to does of 5×1017/cm2. The structure of the silicides was investigated using X-ray diffraction (XRD) and transmission electron microscopy (TEM). TEM analysis shows that if the ion dose is greater than 2×1017/cm2, a continuous silicide layer will be formed. The sheet resistance of Co silicide decreases with an increase in ion flux and ion dose. The formation of silicides with CoSi and CoSi2 are identified by XRD analysis. After annealing, the sheet resistance decreases further. A continuous silicide layer with a width of 90-133 nm is formed. The optimal implantation condition is that the ion flux and dose are 50 mA/cm2 and 5×1017/cm2, respectively. The optimal annealing temperature and time are 900℃ and 10 s, respectively. The ohmic contact for power microwave transistors is fabricated using Co ion implantation technique for the first time. The emitter contact resistance and noise of the transistors decrease markedly; the microwave property has been improved obviously.