基片偏压对电弧离子镀ZrN薄膜微结构和表面形貌的影响(英文)

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Published in:中国有色金属学会会刊：英文版 2012 (S1), p.115-119
Main Author: 张敏 胡小刚 杨晓旭 徐菲菲 金光浩 邵志刚
Format: Article
Language:English
Subjects:
基片偏压
微结构
氮化锆
电弧离子镀
薄膜
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source ScienceDirect Freedom Collection
subjects 基片偏压
微结构
氮化锆
电弧离子镀
薄膜
title 基片偏压对电弧离子镀ZrN薄膜微结构和表面形貌的影响(英文)
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