Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures （SiH4/C2H4/Ar） Radio-Frequency Discharge

Optical emission spectroscopy and Langmuir Probe diagnostics were incorporated into the experiment, in which dust particles were formed in-situ by using reactive mixture gases （SiHa/C2H4/Ar） in a radio-frequency （RF） discharge plasma. The excitation temperature was first calculated by combining seve...

Full description

Saved in:
Bibliographic Details
Published in:等离子体科学和技术：英文版 2011, Vol.13 (5), p.561-566
Main Author: 吴静 张鹏云 孙继忠 姚列明 段旭如
Format: Article
Language:English
Subjects:
发射光谱
射频功率
探针诊断
放电参数
朗缪尔探针
混合物
电子温度测量
等离子体反应
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Optical emission spectroscopy and Langmuir Probe diagnostics were incorporated into the experiment, in which dust particles were formed in-situ by using reactive mixture gases （SiHa/C2H4/Ar） in a radio-frequency （RF） discharge plasma. The excitation temperature was first calculated by combining several optical emission spectra of argon lines and using a Boltzmann distribution to fit the experimental data, then the excitation temperature as functions of both gas pressure and RF power in SiH4/C2Ha/Ar discharges for different discharge conditions were obtained. Correspondingly, based on the measurement of the electron temperature by a Langmuir probe, the excitation temperature was compared with the electron temperature, and some discussions were presented. Finally the emission intensities of spectral lines of Si 390.6 ran, Si2＋ 380.6 nm and C＋ 426.7 nm were measured and presented as functions of pressure, RF power and flow rate of SiH4/C2H4.
ISSN:1009-0630