高功率等离子磁控溅射法制备含钛类金刚石碳膜（英文）

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Bibliographic Details
Published in:中国有色金属学报：英文版 2012, Vol.22 (6), p.1381-1386
Main Author: YANG Peng SUNG Chia-chi FUH Yiin-Kuen CHU Chun-lin LO Chih-hung
Format: Article
Language:English
Subjects:
类金刚石碳膜
金属-类金刚石碳膜
高功率等离子磁控溅射
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ISSN:1003-6326