Design of the High Line Density Gold Transmission Phase Grating for Soft X-Rays Diagnostics

Rigorous coupled-wave analysis is used to calculate the diffraction efficiency of gold transmission phase grating with period of 100 nm. Results show that the maximum efficiency of 22% is obtained with the groove depth of 100 nm and duty cycle of 0.5 at the wavelength of 9.2 nm. With the groove dept...

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Bibliographic Details
Published in:材料科学与工程：中英文A版 2013, Vol.3 (5), p.363-367
Main Author: Juntao Liu Xiao Yuan Shang Wu Keming Jiang Xiang Zhang Kuaisheng Zou Guiju Zhang
Format: Article
Language:Chinese
Subjects:
严格耦合波分析
传输
相位光栅
线密度
衍射效率
设计
软X射线诊断
金
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Summary:Rigorous coupled-wave analysis is used to calculate the diffraction efficiency of gold transmission phase grating with period of 100 nm. Results show that the maximum efficiency of 22% is obtained with the groove depth of 100 nm and duty cycle of 0.5 at the wavelength of 9.2 nm. With the groove depth of 150 nm, the diffraction efficiency exceeds 10% in a large wavelength range from 1 nm to 14 nm. Moreover, high efficiency can be achieved by controlling the grating depth and duty cycle. The high line density transmission grating has important applications in X-ray diagnostics and spectroscopy.
ISSN:2161-6213