Sensing Characteristics of Shear-Mode A1N Solidly Mounted Resonators with a Silicone Microfluidic System in Viscous Media

A1N solidly mounted resonators with silicone microfiuidic systems vibrating in shear mode are fabricated and characterized. The fabrication process is compatible with integrated circuits and the c-axis tilted A1N films are deposited, which allow in-liquid operation through excitation of the shear mo...

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Bibliographic Details
Published in:中国物理快报：英文版 2014 (2), p.141-145
Main Author: 熊娟 郭鹏 孙锡亮 王升富 胡明哲 顾豪爽
Format: Article
Language:English
Subjects:
乙二醇水溶液
传感特性
剪切模式
安装
微流体系统
粘稠介质
聚硅氧烷
谐振器
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Summary:A1N solidly mounted resonators with silicone microfiuidic systems vibrating in shear mode are fabricated and characterized. The fabrication process is compatible with integrated circuits and the c-axis tilted A1N films are deposited, which allow in-liquid operation through excitation of the shear mode. The silicone microfluidic system is mounted on top of the sensor chip to transport the analyses and confine the flow to the active area. The properties of sensor operation in air, deionized water, ethanol, isopropanol, 80% glycol aqueous solution, glycol, and olive oil are characterized. The effects of different viscosities on the resonance frequency shift and Q-factor of the sensor have been discussed. The sensitivity and Q value in glycol of the sensor are 1.52 MHz cm2/μg and around 60, respectively. The results indicate the potential of a highly sensitive microfiuidic sensor system for the applications in viscous media.
ISSN:0256-307X
1741-3540