Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C_2H_2/Ar mixture

Physical qualities of dusty plasma in the pulsed radio-frequency C_2H_2/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model.Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution,the neutral gas...

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Bibliographic Details
Published in:中国物理B：英文版 2017, Vol.26 (4), p.270-275
Main Author: 刘相梅 李瑞 郑亚辉
Format: Article
Language:English
Subjects:
尘土
氩气
水动力学模型
混合
等离子体密度
调制频率
颗粒密度
驱动模式
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Summary:Physical qualities of dusty plasma in the pulsed radio-frequency C_2H_2/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model.Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution,the neutral gas energy equation is taken into accounted.The effects of pulse parameters（dust ratio,modulation frequency） on the nanoparticle formation and growth process are mainly discussed.The calculation results show that,as the duty ratio increases,the mode transition from the sheath oscillation（a regime） to the secondary electron heating（7 regime） occurred,which is quite different from the conventional pulsed discharge.Moreover,the effect of modulation frequency on the width of sheath and plasma density is analyzed.Compared with the H_2CC~-ions,the modulation frequency effect on the nanoparticles density becomes more prominent.
ISSN:1674-1056
2058-3834