Thermal Stability of Magnetron Sputtered Low Hydrogen Content Diamondlike Carbon

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Bibliographic Details
Published in:Chinese physics letters 1994-05, Vol.11 (5), p.285-288, Article 285
Main Authors: Degang, Cheng, Fanxiu, Lü, Qinbiao, Sun, Wenxiu, Yu, Rang, Yang
Format: Article
Language:English
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/11/5/008