Structural Characterization of Sputtered Fe 70 Pd 30 Thin Films During Ex Situ and In Situ TEM Heating

Magnetic shape memory (MSM) thin films have been investigated for their use as actuators and sensors in micro‐electro‐mechanical systems (MEMS). Here, we report on the fabrication of polycrystalline Fe 7 Pd 3 thin films by magnetron sputtering. Two‐dimensionally structured, freestanding films can be...

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Bibliographic Details
Published in:Advanced engineering materials 2012-08, Vol.14 (8), p.716-723
Main Authors: Bechtold, Christoph, Lotnyk, Andriy, Erkartal, Burak, Kienle, Lorenz, Quandt, Eckhard
Format: Article
Language:English
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Summary:Magnetic shape memory (MSM) thin films have been investigated for their use as actuators and sensors in micro‐electro‐mechanical systems (MEMS). Here, we report on the fabrication of polycrystalline Fe 7 Pd 3 thin films by magnetron sputtering. Two‐dimensionally structured, freestanding films can be obtained by the use of different lift‐off techniques and optical lithography. The effect of different heat treatments is discussed. In situ transmission electron microscopy of the as deposited films up to 850 °C shows intermediate phases during heating. Significant changes in magnetic properties of the intermediate phases are observed in complementary investigations on ex situ annealed freestanding films.
ISSN:1438-1656
1527-2648
DOI:10.1002/adem.201200041