Oxygen effect on characteristics of a PGMA resist

Saved in:
Bibliographic Details
Published in:Journal of applied polymer science 1982-03, Vol.27 (3), p.1087-1090
Main Authors: Taniguchi, Yoshio, Kaneko, Tadao, Nakano, Toshio, Hashimoto, Michiaki, Sasano, Akira, Tsutsui, Ken, Naraoka, Kiyotake
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0021-8995
1097-4628
DOI:10.1002/app.1982.070270327