High-Q LIGA-MEMS vertical cantilever variable capacitors for upper microwave frequencies

Simulation results for four MEMS variable capacitors suitable for fabrication using the LIGA process are presented. A Q‐factor as high as 435.6 was obtained using a copper‐device layer. The capacitor with a nominal capacitance of 0.24 pF has a self‐resonant frequency of 33.7 GHz, making it suitable...

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Bibliographic Details
Published in:Microwave and optical technology letters 2004-09, Vol.42 (6), p.507-511
Main Authors: Haluzan, Darcy T., Klymyshyn, David M.
Format: Article
Language:English
Subjects:
LIGA
MEMS
microwave
variable capacitor
X-ray lithography
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Summary:Simulation results for four MEMS variable capacitors suitable for fabrication using the LIGA process are presented. A Q‐factor as high as 435.6 was obtained using a copper‐device layer. The capacitor with a nominal capacitance of 0.24 pF has a self‐resonant frequency of 33.7 GHz, making it suitable for operation up to frequencies of approximately 18 GHz. Using a “pull‐away” actuation design, a tuning ratio of 1.43:1 was obtained with tuning voltages as low as 6.1 V. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 42: 507–511, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20352
ISSN:0895-2477
1098-2760
DOI:10.1002/mop.20352