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Effects related to deposition temperature of ZnCoO films grown by atomic layer deposition - uniformity of Co distribution, structural, optical, electrical and magnetic properties: Effects related to deposition temperature of ZnCoO films grown by ALD
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Published in: | physica status solidi (b) 2010-07, Vol.247 (7), p.1666-1670 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0370-1972 |
DOI: | 10.1002/pssb.200983689 |