Chemical Vapor Deposition Growth of BN Thin Films Using B 2 H 6 and NH 3

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Bibliographic Details
Published in:physica status solidi (b) 2020-02, Vol.257 (2)
Main Authors: Yamada, Hisashi, Inotsume, Sho, Kumagai, Naoto, Yamada, Toshikazu, Shimizu, Mitsuaki
Format: Article
Language:English
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ISSN:0370-1972
1521-3951
DOI:10.1002/pssb.201900318