Chemical Vapor Deposition Growth of BN Thin Films Using B 2 H 6 and NH 3

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Published in:physica status solidi (b) 2020-02, Vol.257 (2)
Main Authors: Yamada, Hisashi, Inotsume, Sho, Kumagai, Naoto, Yamada, Toshikazu, Shimizu, Mitsuaki
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Language:English
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creator Yamada, Hisashi
Inotsume, Sho
Kumagai, Naoto
Yamada, Toshikazu
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title Chemical Vapor Deposition Growth of BN Thin Films Using B 2 H 6 and NH 3
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