Ultrathin Al 1− x Sc x N for Low‐Voltage‐Driven Ferroelectric‐Based Devices

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Bibliographic Details
Published in:Physica status solidi. PSS-RRL. Rapid research letters 2023-01, Vol.17 (1)
Main Authors: Schönweger, Georg, Islam, Md Redwanul, Wolff, Niklas, Petraru, Adrian, Kienle, Lorenz, Kohlstedt, Hermann, Fichtner, Simon
Format: Article
Language:English
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ISSN:1862-6254
1862-6270
DOI:10.1002/pssr.202200312