Electron optical characteristics of a concave electrostatic electron mirror for a scanning electron microscope

Numerical computer calculations are used to explore the design characteristics of a concave electrostatic electron mirror for a mirror‐attachment for a conventional scanning electron microscope or an instrument designed totally as a scanning electron mirror microscope. The electron paths of a number...

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Bibliographic Details
Published in:Scanning 1984, Vol.6 (1), p.75-79
Main Authors: Hamarat, R. T., Witzani, J., Hörl, E. M.
Format: Article
Language:English
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Summary:Numerical computer calculations are used to explore the design characteristics of a concave electrostatic electron mirror for a mirror‐attachment for a conventional scanning electron microscope or an instrument designed totally as a scanning electron mirror microscope. The electron paths of a number of set‐ups are calculated and drawn graphically in order to find the optimum shape and dimensions of the mirror geometry. This optimum configuration turns out to be the transition configuration between two cases of electron path deflection, towards the optical axis of the system and away from it.
ISSN:0161-0457
1932-8745
DOI:10.1002/sca.4950060104