Cryopump vibration isolation system for an SEM

A standard commercially available cryopump system has been installed on a scanning electron microscope (SEM) using specially optimized vacuum vibration isolation bellows. This installation was successful in reducing the cryopump‐induced vibration to a level that did not degrade the standard performa...

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Bibliographic Details
Published in:Scanning 1991, Vol.13 (6), p.404-409
Main Authors: Postek, M. T., Keery, W. J.
Format: Article
Language:English
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Summary:A standard commercially available cryopump system has been installed on a scanning electron microscope (SEM) using specially optimized vacuum vibration isolation bellows. This installation was successful in reducing the cryopump‐induced vibration to a level that did not degrade the standard performance or resolution of the SEM in the pump‐on mode and, in the pump‐off (or coasting) mode, eliminated all measurable instrument‐induced vibration (i.e., from the vacuum system). This article outlines the manner in which this performance has been accomplished and presents the results of an experiment demonstrating the reduction of specimen contamination provided by this type of vacuum system.
ISSN:0161-0457
1932-8745
DOI:10.1002/sca.4950130604