Image correlation: Application to correction of beam current fluctuations in quantitative surface microscopy

The York multi‐spectral Auger microscope has been used to demonstrate the use of the anticorrelation between a SEM and a sample current image fluctuations. Such fluctuations may be important when using very bright electron sources or when collecting image data over long periods of time.

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Bibliographic Details
Published in:Surface and interface analysis 1991-04, Vol.17 (4), p.209-212
Main Authors: Barkshire, I. R., Greenwood, J. C., Kenny, P. G., Prutton, M., Roberts, R. H., El Gomati, M. M.
Format: Article
Language:English
Subjects:
Exact sciences and technology
Metrology, measurements and laboratory procedures
Physics
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Description
Summary:The York multi‐spectral Auger microscope has been used to demonstrate the use of the anticorrelation between a SEM and a sample current image fluctuations. Such fluctuations may be important when using very bright electron sources or when collecting image data over long periods of time.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.740170408