Auger analysis of Ni/Au/Te and Au/Te Ohmic Contacts on n-GaAs

The characterization of Ni/Au/Te and Au/Te contacts on n‐GaAs by Auger electron spectroscopy is studied by surface element mapping and depth profiling. Owing to the high lateral resolution of AES, important characteristics of these metallization schemes, which could not be detected by any other tech...

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Bibliographic Details
Published in:Surface and interface analysis 1992-06, Vol.19 (1-12), p.318-324
Main Authors: Bender, H., Wuyts, K., Watté, J., Silverans, R. E.
Format: Article
Language:English
Subjects:
Analytical chemistry
Chemistry
Exact sciences and technology
Spectrometric and optical methods
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Summary:The characterization of Ni/Au/Te and Au/Te contacts on n‐GaAs by Auger electron spectroscopy is studied by surface element mapping and depth profiling. Owing to the high lateral resolution of AES, important characteristics of these metallization schemes, which could not be detected by any other technique, are revealed. Comparison with other analysis technique is performed, yielding important insight into the mechanism of ohmic conductivity.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.740190160