Enhanced SIMS analysis performance by CCl 4 flooding technique

The CCl 4 flooding technique combined with oxygen ion bombardment has been used during SIMS analysis. The secondary ion yield and the matrix effect have been investigated. The results have been compared with those obtained under oxygen bombardment or under oxygen bombardment plus oxygen flooding. We...

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Bibliographic Details
Published in:Surface and interface analysis 1993-07, Vol.20 (8), p.716-718
Main Authors: Gao, Y., Migeon, H. N., Juhel, M., Lecart, J.
Format: Article
Language:English
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Summary:The CCl 4 flooding technique combined with oxygen ion bombardment has been used during SIMS analysis. The secondary ion yield and the matrix effect have been investigated. The results have been compared with those obtained under oxygen bombardment or under oxygen bombardment plus oxygen flooding. We show that this simple technique allows a significant enhancement of ion yield for all the elements studied and induces a weak matrix effect.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.740200816