Heavy ion induced Ti X‐ray satellite structure for Ti, TiN, and TiO 2 thin films

X‐ray emission spectra of three different titanium‐containing thin films, Ti, TiO 2 , and TiN, were measured using 5.1 MeV 7 Li 2+ , 4.4–6.8 MeV 12 C 3+ , 6.8 MeV 16 O 3+ , and 11.9 MeV 63 Cu 6+ beams as excitation. The energy spectra were collected using a high energy resolution transition‐edge sen...

Full description

Saved in:
Bibliographic Details
Published in:X-ray spectrometry 2018-11, Vol.47 (6), p.475-483
Main Authors: Käyhkö, Marko, Palosaari, Mikko R. J., Laitinen, Mikko, Arstila, Kai, Maasilta, Ilari J., Sajavaara, Timo
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:X‐ray emission spectra of three different titanium‐containing thin films, Ti, TiO 2 , and TiN, were measured using 5.1 MeV 7 Li 2+ , 4.4–6.8 MeV 12 C 3+ , 6.8 MeV 16 O 3+ , and 11.9 MeV 63 Cu 6+ beams as excitation. The energy spectra were collected using a high energy resolution transition‐edge sensor array. In all measurements, the average L‐shell vacancy fraction was higher for the metallic Ti than for the other samples, whereas the difference between TiN and TiO 2 was negligible. The universal variable X n of the geometrical model was used to study the systematics of the average L‐shell vacancy fraction at the time of K α emission. Our experiments expand previously studied X n values, and a fairly good agreement with previous studies was found.
ISSN:0049-8246
1097-4539
DOI:10.1002/xrs.2976