Soft x-ray multilayer monochromator with improved resolution and low specular background

A new soft‐x‐ray multilayer monochromator with an improved resolution and a low specular background is presented. The principles of the device, based on the use of a lamellar multilayer amplitude grating (LMAG), are summarized. The techniques of fabrication of the monochromator (multilayer depositio...

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Bibliographic Details
Published in:X-ray spectrometry 2001-07, Vol.30 (4), p.212-215
Main Authors: André, Jean-Michel, Benbalagh, Rabah, Barchewitz, Robert, Ravet, Marie-Françoise, Raynal, Alain, Delmotte, Frank, Bridou, Françoise, Julie, Gwaénäelle, Bosseboeuf, Alain, Laval, René, Soullié, Gérard, Rémond, Christian, Fialin, Michel
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
X- and γ-ray instruments and techniques
X- and γ-ray sources, mirrors, gratings and detectors
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Summary:A new soft‐x‐ray multilayer monochromator with an improved resolution and a low specular background is presented. The principles of the device, based on the use of a lamellar multilayer amplitude grating (LMAG), are summarized. The techniques of fabrication of the monochromator (multilayer deposition, UV lithography and reactive ion etching) are given. The performance of this new monochromator at photon energies around 1500 eV is demonstrated. Copyright © 2001 John Wiley & Sons, Ltd.
ISSN:0049-8246
1097-4539
DOI:10.1002/xrs.489