Surface-near analyses of ultra thin silicon nitride layers by NRA, channeling RBS, FT IR ellipsometry and AFM

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Bibliographic Details
Published in:Fresenius' Journal of Analytical Chemistry 1995-01, Vol.353 (5-8), p.734-739
Main Authors: MARKWITZ, A, BAUMANN, H, GRILL, W, HEINZ, B, RÖSELER, A, KRIMMEL, E. F, BETHGE, K
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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ISSN:0937-0633
1432-1130
1618-2650
DOI:10.1007/BF00321360