Photoluminescence detection of impurities introduced in silicon by dry etching processes

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Bibliographic Details
Published in:Applied Physics A Solids and Surfaces 1986-11, Vol.41 (3), p.175-178
Main Authors: WEBER, J, DAVIS, R. J, HABERMEER, H. -U, SAWYER, W. D, SINGH, M
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Defects and impurities in crystals
microstructure
Exact sciences and technology
Impurities: concentration, distribution, and gradients
Physics
Structure of solids and liquids
crystallography
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ISSN:0721-7250
1432-0630
DOI:10.1007/BF00616836