Gas phase versus surface contributions to photolytic laser chemical vapor deposition rates

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Bibliographic Details
Published in:Applied Physics A Solids and Surfaces 1988-04, Vol.45 (4), p.337-343
Main Authors: Braichotte, D., Bergh, H.
Format: Article
Language:English
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ISSN:0721-7250
1432-0630
DOI:10.1007/BF00617940