Ion beam exposure of resists: I. Statistical limitations

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Bibliographic Details
Published in:Applied Physics A Solids and Surfaces 1982-04, Vol.27 (4), p.239-241
Main Authors: Ryssel, H., Prinke, G., Bernt, H., Haberger, K., Hoffmann, K.
Format: Article
Language:English
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ISSN:0721-7250
1432-0630
DOI:10.1007/BF00619085