Excimer-laser etching on silicon

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Bibliographic Details
Published in:Applied Physics A Solids and Surfaces 1987-12, Vol.44 (4), p.313-322
Main Authors: HORIIKE, Y, HAYASAKA, N, SEKINE, M, ARIKADO, T, NAKASE, M, OKANO, H
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0721-7250
1432-0630
DOI:10.1007/BF00624598