Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum

The laser chemical vapor deposition of Pt from its bishexafluoroacetylacetonate derivative is studied with a cw argon ion laser at 458 and 514 nm. The height, the width, and the electrical conductivity of the deposited stripes are reported as a function of the vapor pressure of the metalorganic prec...

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Bibliographic Details
Published in:Applied Physics A Solids and Surfaces 1987-12, Vol.44 (4), p.353-359
Main Authors: BRAICHOTTE, D, VAN DEN BERGH, H
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:The laser chemical vapor deposition of Pt from its bishexafluoroacetylacetonate derivative is studied with a cw argon ion laser at 458 and 514 nm. The height, the width, and the electrical conductivity of the deposited stripes are reported as a function of the vapor pressure of the metalorganic precurser, the laser intensity, and the writing speed. 15 ref.--AA
ISSN:0721-7250
1432-0630
DOI:10.1007/BF00624603