Integral silicon pressure transducer with trimming resistors on the crystal

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Bibliographic Details
Published in:Measurement techniques 1980-05, Vol.23 (5), p.405-408
Main Authors: Vaganov, V. I., Beklemishev, V. V., Goncharova, N. I., Noskin, A. B.
Format: Article
Language:English
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ISSN:0543-1972
1573-8906
DOI:10.1007/BF00824530