Laser diffraction installation to measure small linear dimensions

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Bibliographic Details
Published in:Measurement techniques 1990-02, Vol.33 (2), p.119-122
Main Authors: Vesel'ev, V. M., Lizunov, V. D., Zagarskikh, S. A.
Format: Article
Language:English
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ISSN:0543-1972
1573-8906
DOI:10.1007/BF00866263