Nd: YAG laser annealing of gallium-implanted silicon

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 1981-04, Vol.24 (4), p.319-322
Main Authors: Takai, M., Tsou, S. C., Tsien, P. H., Röschenthaler, D., Ryssel, H.
Format: Article
Language:English
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ISSN:0947-8396
1432-0630
DOI:10.1007/BF00899729