Some features of the electrical forming of MDM systems based on silicon oxynitride films

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Bibliographic Details
Published in:Soviet Physics Journal 1976-05, Vol.19 (5), p.602-605
Main Authors: Burdovitsin, V. A., Galanskii, B. L., Smirnova, K. I., Yankelevich, Yu. B.
Format: Article
Language:English
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ISSN:0038-5697
1573-9228
DOI:10.1007/BF00952560