Gas-phase combination reactions of SF4 and SF5 with F in plasmas of SF6

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Bibliographic Details
Published in:Plasma chemistry and plasma processing 1988-09, Vol.8 (3), p.281-291
Main Authors: RYAN, K. R, PLUMB, I. C
Format: Article
Language:English
Subjects:
Chemistry
Exact sciences and technology
Inorganic chemistry and origins of life
Kinetics and mechanism of reactions
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ISSN:0272-4324
1572-8986
DOI:10.1007/BF01020407