Breakdown of thin films ?cured? with tantalum oxide

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Bibliographic Details
Published in:Soviet Physics Journal 1977-04, Vol.20 (4), p.523-526
Main Authors: Brekhunov, V. I., Motoshkin, V. V., Mukhachev, V. A.
Format: Article
Language:English
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ISSN:0038-5697
1573-9228
DOI:10.1007/BF01207702