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Comparison of depth profiles in SIMS by a fuzzy method

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Bibliographic Details
Published in:Mikrochimica acta (1966) 1992-05, Vol.106 (3-6), p.163-173
Main Authors: OTTO, M, STINGEDER, G, PIPLITS, K, GRASSERBAUER, M, HEINRICH, M
Format: Article
Language:English
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ISSN:0026-3672
1436-5073
DOI:10.1007/BF01242087