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Comparison of depth profiles in SIMS by a fuzzy method
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Published in: | Mikrochimica acta (1966) 1992-05, Vol.106 (3-6), p.163-173 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0026-3672 1436-5073 |
DOI: | 10.1007/BF01242087 |