Spatial resolution limitation in Auger microanalysis of compounds

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Bibliographic Details
Published in:Mikrochimica acta (1966) 1994-12, Vol.114-115 (1), p.413-419
Main Authors: Polonsky, Boris A., Protopopov, Oleg D.
Format: Article
Language:English
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ISSN:0026-3672
1436-5073
DOI:10.1007/BF01244568