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Investigation of Al diffusion in different oxide thin-film layers by SNMS/HFM method

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Published in:	Mikrochimica acta (1966) 1997-01, Vol.125 (1-4), p.223-227
Main Authors:	PAULUS, H, KORNELY, S, GIBER, J, MÜLLER, K.-H
Format:	Article
Language:	English
Subjects:	Chemical interdiffusion diffusion barriers Condensed matter: structure, mechanical and thermal properties Diffusion in solids Exact sciences and technology Physics Transport properties of condensed matter (nonelectronic)
Citations:	Items that this one cites Items that cite this one
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source	Springer Link
subjects	Chemical interdiffusion diffusion barriers Condensed matter: structure, mechanical and thermal properties Diffusion in solids Exact sciences and technology Physics Transport properties of condensed matter (nonelectronic)
title	Investigation of Al diffusion in different oxide thin-film layers by SNMS/HFM method
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