Parametric study of atmospheric-pressure diamond synthesis with an inductively coupled plasma torch

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Bibliographic Details
Published in:Plasma chemistry and plasma processing 1993-09, Vol.13 (3), p.433-446
Main Authors: OWANO, T. G, KRUGER, C. H
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0272-4324
1572-8986
DOI:10.1007/BF01465874