Process-parameter optimization of Sb2O3 films in the ultraviolet and visible region for interferometric applications

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 1996-08, Vol.63 (2), p.195-202
Main Authors: SAHOO, N. K, APPARAO, K. V. S. R
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Insulators
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
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ISSN:0947-8396
1432-0630
DOI:10.1007/bf01567650