Laser-induced etching of polycrystalline Al2O3TiC in KOH aqueous solution

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 1996, Vol.62 (1), p.43-49
Main Authors: LU, Y.-F, YE, K.-D
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Materials science
Microelectronic fabrication (materials and surfaces technology)
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface cleaning, etching, patterning
Surface treatments
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ISSN:0947-8396
1432-0630
DOI:10.1007/bf01568086